JPH0648826Y2 - 着脱式の放電電極 - Google Patents
着脱式の放電電極Info
- Publication number
- JPH0648826Y2 JPH0648826Y2 JP1988097336U JP9733688U JPH0648826Y2 JP H0648826 Y2 JPH0648826 Y2 JP H0648826Y2 JP 1988097336 U JP1988097336 U JP 1988097336U JP 9733688 U JP9733688 U JP 9733688U JP H0648826 Y2 JPH0648826 Y2 JP H0648826Y2
- Authority
- JP
- Japan
- Prior art keywords
- bottom plate
- discharge electrode
- mold
- mold material
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 32
- 239000010408 film Substances 0.000 description 9
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- -1 etc. Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988097336U JPH0648826Y2 (ja) | 1988-07-25 | 1988-07-25 | 着脱式の放電電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988097336U JPH0648826Y2 (ja) | 1988-07-25 | 1988-07-25 | 着脱式の放電電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0220325U JPH0220325U (en]) | 1990-02-09 |
| JPH0648826Y2 true JPH0648826Y2 (ja) | 1994-12-12 |
Family
ID=31322713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988097336U Expired - Lifetime JPH0648826Y2 (ja) | 1988-07-25 | 1988-07-25 | 着脱式の放電電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648826Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117204124A (zh) * | 2021-09-28 | 2023-12-08 | 岛津产业机械系统株式会社 | 等离子体处理装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0750701B2 (ja) * | 1985-04-01 | 1995-05-31 | 日電アネルバ株式会社 | 放電反応装置 |
| JPS6393084A (ja) * | 1986-10-07 | 1988-04-23 | Mitsubishi Electric Corp | 文字読取り装置 |
-
1988
- 1988-07-25 JP JP1988097336U patent/JPH0648826Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0220325U (en]) | 1990-02-09 |
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